alpos le_move1_z l1z Platesetter_3244 With a plate is queued on the load table, the load cycle begins by moving the plate down (Z) so that the bottom edge is close to the LEC. The distance which it moves from the queued position downwards is le_move1_z. integer
  • 140000
    •
  • 0 to 500000 [mm]
    •      cal
  • ../nvs/alpos_cal_l2z.xmlNVS: alpos l2z
    •
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    •  Updated: Wed Jul 16 19:36:20 2008 PST